Chemical Vapor Deposition And Selective Etching Of Silicon Carbide Films
Tech ID: 17220 / UC Case 2003-016-0
Abstract
Patent Status
| Country | Type | Number | Dated | Case |
| United States Of America | Issued Patent | 7,151,277 | 12/19/2006 | 2003-016 |
Contact
- Michael Cohen
- mcohen@berkeley.edu
- tel: View Phone Number.
